JPH0274587U - - Google Patents

Info

Publication number
JPH0274587U
JPH0274587U JP15382688U JP15382688U JPH0274587U JP H0274587 U JPH0274587 U JP H0274587U JP 15382688 U JP15382688 U JP 15382688U JP 15382688 U JP15382688 U JP 15382688U JP H0274587 U JPH0274587 U JP H0274587U
Authority
JP
Japan
Prior art keywords
eccentric
eccentric portion
maximum
outer peripheral
rotary compressor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15382688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH078865Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15382688U priority Critical patent/JPH078865Y2/ja
Publication of JPH0274587U publication Critical patent/JPH0274587U/ja
Application granted granted Critical
Publication of JPH078865Y2 publication Critical patent/JPH078865Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP15382688U 1988-11-25 1988-11-25 ロータリー圧縮機 Expired - Lifetime JPH078865Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15382688U JPH078865Y2 (ja) 1988-11-25 1988-11-25 ロータリー圧縮機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15382688U JPH078865Y2 (ja) 1988-11-25 1988-11-25 ロータリー圧縮機

Publications (2)

Publication Number Publication Date
JPH0274587U true JPH0274587U (en]) 1990-06-07
JPH078865Y2 JPH078865Y2 (ja) 1995-03-06

Family

ID=31430009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15382688U Expired - Lifetime JPH078865Y2 (ja) 1988-11-25 1988-11-25 ロータリー圧縮機

Country Status (1)

Country Link
JP (1) JPH078865Y2 (en])

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6878206B2 (en) 2001-07-16 2005-04-12 Applied Materials, Inc. Lid assembly for a processing system to facilitate sequential deposition techniques
US6911391B2 (en) 2002-01-26 2005-06-28 Applied Materials, Inc. Integration of titanium and titanium nitride layers
US6951804B2 (en) 2001-02-02 2005-10-04 Applied Materials, Inc. Formation of a tantalum-nitride layer
US7033922B2 (en) 2000-06-28 2006-04-25 Applied Materials. Inc. Method and system for controlling the presence of fluorine in refractory metal layers
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
US7085616B2 (en) 2001-07-27 2006-08-01 Applied Materials, Inc. Atomic layer deposition apparatus
US7115499B2 (en) 2002-02-26 2006-10-03 Applied Materials, Inc. Cyclical deposition of tungsten nitride for metal oxide gate electrode
US7208413B2 (en) 2000-06-27 2007-04-24 Applied Materials, Inc. Formation of boride barrier layers using chemisorption techniques
US7262133B2 (en) 2003-01-07 2007-08-28 Applied Materials, Inc. Enhancement of copper line reliability using thin ALD tan film to cap the copper line
US7352048B2 (en) 2001-09-26 2008-04-01 Applied Materials, Inc. Integration of barrier layer and seed layer
US7405158B2 (en) 2000-06-28 2008-07-29 Applied Materials, Inc. Methods for depositing tungsten layers employing atomic layer deposition techniques

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7538473B2 (en) 2004-02-03 2009-05-26 S.C. Johnson & Son, Inc. Drive circuits and methods for ultrasonic piezoelectric actuators
KR101878670B1 (ko) * 2012-01-06 2018-07-16 엘지전자 주식회사 로터리 압축기

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7501343B2 (en) 2000-06-27 2009-03-10 Applied Materials, Inc. Formation of boride barrier layers using chemisorption techniques
US7208413B2 (en) 2000-06-27 2007-04-24 Applied Materials, Inc. Formation of boride barrier layers using chemisorption techniques
US7033922B2 (en) 2000-06-28 2006-04-25 Applied Materials. Inc. Method and system for controlling the presence of fluorine in refractory metal layers
US7405158B2 (en) 2000-06-28 2008-07-29 Applied Materials, Inc. Methods for depositing tungsten layers employing atomic layer deposition techniques
US6951804B2 (en) 2001-02-02 2005-10-04 Applied Materials, Inc. Formation of a tantalum-nitride layer
US6878206B2 (en) 2001-07-16 2005-04-12 Applied Materials, Inc. Lid assembly for a processing system to facilitate sequential deposition techniques
US7085616B2 (en) 2001-07-27 2006-08-01 Applied Materials, Inc. Atomic layer deposition apparatus
US7352048B2 (en) 2001-09-26 2008-04-01 Applied Materials, Inc. Integration of barrier layer and seed layer
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
US7094685B2 (en) 2002-01-26 2006-08-22 Applied Materials, Inc. Integration of titanium and titanium nitride layers
US7473638B2 (en) 2002-01-26 2009-01-06 Applied Materials, Inc. Plasma-enhanced cyclic layer deposition process for barrier layers
US6911391B2 (en) 2002-01-26 2005-06-28 Applied Materials, Inc. Integration of titanium and titanium nitride layers
US7115499B2 (en) 2002-02-26 2006-10-03 Applied Materials, Inc. Cyclical deposition of tungsten nitride for metal oxide gate electrode
US7262133B2 (en) 2003-01-07 2007-08-28 Applied Materials, Inc. Enhancement of copper line reliability using thin ALD tan film to cap the copper line

Also Published As

Publication number Publication date
JPH078865Y2 (ja) 1995-03-06

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